Kosuke Takenaka

→ Search for Kosuke Takenaka in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)

Poster presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[11a-PA5-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:30 AM - 11:30 AM

[11a-PA5-8] Droplet-Vaporization Behavior in Plasma during Plasma-assisted Mist Chemical Vapor Deposition

〇Kosuke Takenaka¹, Yuichi Setsuhara¹ (1.Osaka Univ.)

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

12:15 PM - 12:30 PM

[12a-W641-13] Formation of IGZO Thin Film Transistor at Large Area Substrate with Plasma Enhanced Reactive process

Yuichi Setsuhara¹, 〇Kosuke Takenaka¹, Tomoki Yoshitani¹, Hiroyuki Hirayama¹, Masashi Endo¹, Giichiro Uchida¹, Akinori Ebe² (1.Osaka Univ., 2.EMD Corp.)

▲