Masahiko Tani

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:00 AM - 10:15 AM

△ [12a-W641-5] Surface Modification of Polytetrafluoroethylene
by Atmospheric Pressure Plasma of Ar/Water and Ethanol Vapor Mixture

〇(B)Masahiko Tani¹, Hideki Yajima², Hiroshi Furuta¹, Akimitsu Hatta¹ (1.Kochi Univ. Technol., 2.ORC Manufacturing)