Asaki Kameda

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Speaker, Author, Co-Author

Tue. Mar 12, 2019 9:00 AM - 12:45 PM W641 (W641)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[12a-W641-1~14] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:45 AM - 11:00 AM

[12a-W641-8] Verification of Absolute Temperature of Noncontact Temperature Measurement of Silicon Wafer with Back Surface Temperature Measurement Using Thermocouple

〇(M1)Asaki Kameda¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)