Kiichi Sato

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[9a-PB3-1~18] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 11:30 AM

[9a-PB3-3] Measurement of Electrical Properties for The Buffer Layer in 4H-SiC Wafer with 3 Layer Structure Using THz-TDSE

〇Kiichi Sato¹, Takashi Fujii^1,3, Tsutomu Araki¹, Shinichiro Mori¹, Kotaro Ishiji², Toshiyuki Iwamoto³, Ryuichi Sugie⁴ (1.Ritsumeikan Univ., 2.Kyushu Synchrotron Light Research Center, 3.PNP, 4.TRC)

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