Tomonori Okada

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[9a-PB3-1~18] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 11:30 AM

[9a-PB3-6] High-precision ion-implantation on 4H-SiC by ion-implantation angle control

〇(B)Tomonori Okada¹, Jun Inoue¹, Fumitaka Nishiyama¹, Hiroshi Sezaki², Shin-Ichiro Kuroki¹ (1.RNBS, 2.Phenitec Semicon)