Kexiong Zhang

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 9:00 AM - 12:15 PM W541 (W541)

Oral presentation
| 15 Crystal Engineering
| 15.4 III-V-group nitride crystals

[9a-W541-1~12] 15.4 III-V-group nitride crystals

10:00 AM - 10:15 AM

▲ [9a-W541-5] Low-damage Fabrication of InGaN/GaN Nanopillars by Neutral Beam Etching: Towards Directional Micro-LED in Top-down Structure

〇Kexiong Zhang¹, T. Takahashi¹, N. Kumagai¹, G. W. Cong¹, D. Ohori², K. Endo¹, M. Shimizu^1,3, S. Samukawa², X. L. Wang^1,3 (1.AIST, 2.Tohoku Univ., 3.Nagoya Univ.)

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