Setsuo Nakao

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:30 PM - 3:30 PM M113 (H113)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[9p-M113-1~8] 6.2 Carbon-based thin films

2:45 PM - 3:00 PM

[9p-M113-6] Effect of negative pulse voltage on microstructure of a-C:H films prepared by plasma-based ion implantation and deposition

〇Setsuo Nakao¹, Junho Choi², Tsutomu Sonoda¹ (1.AIST, 2.Univ. Tokyo)