Kensaku Kanomata

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:30 PM - 3:30 PM PA1 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[9p-PA1-1~28] 6.4 Thin films and New materials

1:30 PM - 3:30 PM

[9p-PA1-25] In-situ observation of RT-ALD process on resin films by using infrared absorption spectroscopy

〇Kensaku Kanomata², Kazuki Yoshida¹, Kentaro Saito¹, Masanori Miura², Bashir Ahmmad¹, Shigeru Kubota¹, Kazuhiro Hirahara¹, Fumihiko Hirose¹ (1.Yamagata Univ., 2.ROEL Yamagata Univ.)

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