Toshiki Suwa

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 4:00 PM - 6:00 PM PA4 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[9p-PA4-1~30] 6.3 Oxide electronics

4:00 PM - 6:00 PM

[9p-PA4-22] Effects of sputtering rf power and He dilution on electrical properties of Al-doped ZnO films against radial directions

〇Toshiki Suwa¹, Satoru Imaizumi¹, Kazuki Tsuda¹, Tadashi Nakamura¹, Kunio Okimura¹ (1.Tokai Univ.)