Ryotaro Takaguchi

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:45 PM - 5:45 PM S221 (S221)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[9p-S221-1~15] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:30 PM - 4:45 PM

[9p-S221-11] Diffusion properties of n-type dopants diffused from Spin on Glass into Ge

〇Ryotaro Takaguchi¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. Tokyo)