Akihiro Mitsuya

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Speaker, Author, Co-Author

Sat. Mar 9, 2019 1:30 PM - 6:00 PM W323 (W323)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[9p-W323-1~17] 8.1 Plasma production and diagnostics

3:15 PM - 3:30 PM

△ [9p-W323-8] Experimental study of dual-frequency CCP characteristics

〇(M1)Akihiro Mitsuya¹, Makoto Moriyama¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya univ.)