Tohru Oka

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Chairperson, etc.

Sun. Mar 10, 2019 1:30 PM - 5:50 PM W922 (Multi-Purpose Digital Hall)

Symposium (Oral)
| Symposium
| Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

[10p-W922-1~8] Progress in ion implantation for semiconductor devices -Si, GaAs and WBG materials-

Masayuki Imaizumi(Mitsubishi Electric), Tohru Oka(Toyoda Gosei)