[10a-M114-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[10a-M114-8] Schmid Factor of the Deformation Twinning in the CW Laser Crystallized Si Film

〇Nobuo Sasaki^1,2, Muhammad Arif², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)

Keywords:laser crystallization, cw laser, dislocation

Schmid factors are calculated for the glides of the partial dislocations on the {111} twinning planes of the grown films having (100) and (110) textures in the scan direction. The calculated Schmid factors explain that the deformation twinning is prevented if the grown Si film has (100) texture in the scan direction.