9:30 AM - 11:30 AM
[10a-PB2-4] Fluorination treatment of CaSi2 thin films grown on Si(111)
Keywords:calcium silicide, silicene, fluorination treatment
Fluorination treatment of CaSi2 thin film grown on Si(111) substrate was examined using fluorochemical ionic liquid to fabricate silicene sandwiched by calcium fluoride. By covering the surface of CaSi2 film with SiO2, the reaction between the CaSi2 film surface and the ionic liquid was suppressed, and the lateral diffusion of fluorine was expected to fabricate the silicene structure.