[10a-PB2-1~18] 13.2 Exploratory Materials, Physical Properties, Devices

[10a-PB2-7] Synthesis of Si nanowire/nanosheet complex by MnCl₂/NH₄Cl treatment of CaSi₂

〇Shogo Ito¹, Numazawa Yushin², Weng Mingwei¹, Atsumi Nanae², Ono Yoshiki¹, Huang yalei³, Tatsuoka Hirokazu², Takahashi Naohisa⁴ (1.Fac. Eng., Shizuoka Univ., 2.Grad. Sch. Integr. Sci. & Technol., Shizuoka Univ., 3.Grad. Sch. Sci. & Technol., Shizuoka Univ., 4.Yamaha Advanced Material Research Gr.)

Keywords:silicide semiconductor, nanosheet, nanowire