[10a-S011-1~8] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[10a-S011-5] Challenge of n-type and p-type ZnO thin films fabrication by Mist CVD

〇Misaki Nishi¹, Li Liu¹, Phimolphan Rutthongjan¹, Shota Sato¹, Mariko Ueda¹, Tatuya Yasuoka¹, Ryo Hasegawa¹, Yuki Tagashira¹, Tamako Ozaki¹, Giang T. Dang¹, Toshiyuki Kawaharamura¹ (1.Kochi Univ. Tech.)

Keywords:Mist CVD