The 66th JSAP Spring Meeting, 2019

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13 Semiconductors » 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[10a-S221-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

Sun. Mar 10, 2019 9:00 AM - 12:00 PM S221 (S221)

Yukinori Ono(Shizuoka Univ.), Tetsuo Kodera(Tokyo Tech)

11:30 AM - 11:45 AM

[10a-S221-10] Polarization Effects associated with Discreteness of Substrate Impurities in Drift-Diffusion Simulations

〇(B)Kohei Tsukahara1, Katsuhisa Yoshida2, Nobuyuki Sano2 (1.Univ. of Tsukuba, 2.Inst. Appl. Phys., Univ. of Tsukuba)

Keywords:FinFET, discrete impurities, polarization