[10a-S221-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[10a-S221-8] Charge Pumping Interaction between Two Traps

〇Toshiaki Tsuchiya¹, Masahiro Hori¹, Yukinori Ono¹ (1.Shizuoka Univ.)

Keywords:charge pumping, interface traps, Pb centers

We have established a systematic characterization method of interface traps using charge pumping (CP) technique, and succeeded in evaluation of single interface traps and clarified their essential nature. Moreover, we have corrected fundamentally the conventional CP theory. Based on these findings, charge pumping interactions between two traps are shown in this paper, which may lead to misjudge the CP current from a P_b1 center.