The 66th JSAP Spring Meeting, 2019

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7 Beam Technology and Nanofabrication » 7.5 Ion beams

[10a-S224-1~8] 7.5 Ion beams

Sun. Mar 10, 2019 9:30 AM - 11:30 AM S224 (S224)

Satoshi Abo(Osaka Univ.), Takaaki Aoki(Kyoto Univ.)

10:00 AM - 10:15 AM

[10a-S224-3] Formation of gold nanoparticles in silicon oxide films by ion implantation using a Au-Si alloyed-metal ion source

〇Yuta Okanishi1, Masayoshi Ichimiya1, Junichi Yanagisawa1 (1.Univ. of Shiga Pref.)

Keywords:Ion implantation, Au nano particles