[10a-W521-1~12] 17.2 Graphene

[10a-W521-8] Evaluation of electrical properties of graphene/SiC interface by conductive-AFM measurement

〇Takeshi Fujii¹, Aki Takigawa¹ (1.Fuji electric)

Keywords:Schottky junction

We have measured that the interface electrical property changes from Schottky to ohmic condction by intertion of graphene layers into the metal/n-type SiC interface which is revealed by conductive AFM measuremts. This result indicate that the electron affinity of the n-type SiC was modulated by interaction between the graphene and the n-type SiC.