The 66th JSAP Spring Meeting, 2019

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[10a-W541-1~12] 15.4 III-V-group nitride crystals

Sun. Mar 10, 2019 9:00 AM - 12:15 PM W541 (W541)

Tsutomu Araki(Ritsumeikan Univ.), Yoshihiro Kangawa(Kyushu Univ.)

9:00 AM - 9:15 AM

[10a-W541-1] Study of the Origins of Carbon Impurities on GaN MOVPE from a Gas Phase Reaction Perspective

〇(M1)Yuto Okawachi1, Kenta Chokawa1, Masaaki Araidai2, Akira Kusaba3, Yoshihiro Kangawa3,2, Koichi Kakimoto3, Kenji Shiraishi2,1 (1.Graduate School of Engineering, Nagoya Univ, 2.IMaSS, Nagoya Univ, 3.RIAM, Kyushu Univ)

Keywords:MOVPE, Carbon Impurities