9:45 AM - 10:00 AM
[10a-W611-2] Activation mechanism of passivation effect at the ALD-TiOx/SiOx/c-Si heterointerface ~The impact of effusion of hydrogen atoms~
Keywords:titanium oxide, passivation, atomic layer deposition
Oral presentation
16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells
Sun. Mar 10, 2019 9:30 AM - 12:00 PM W611 (W611)
Katsuhiko Shirasawa(AIST)
9:45 AM - 10:00 AM
Keywords:titanium oxide, passivation, atomic layer deposition