[10p-M112-1~7] 7.1 X-ray technologies

[10p-M112-4] Soft X-ray high-diffraction-efficiency W/C multilayer laminar-type diffraction gratings design for 200-900 eV range

〇Masato Koike¹, Tadashi Hatano², Alexander Pirozhkov¹, Masami Terauchi², Nobukazu Hayashi³, Hiroyuki Sasai³, Tetsuya Nagano³ (1.QuBS, National Inst.for Quantum and Radiological Sci. and Tech., 2.IMRM, Tohoku Univ., 3.Device Dept., Shimadzu Corp.)

Keywords:soft X-ray, diffraction grating, multilayer

Recently, there has been growing interest in photoluminescence analysis near the Fe - L (705 eV) of steel. For this reason, a method for improving the diffraction efficiency by adding an X-ray multilayer film on the ordinary diffraction grating having a metal surface was considered. We calculated the diffraction efficiency of a multilayer laminar-type diffraction grating in which a few pairs of C and W having film thickness of 7 and 6 nm,respectively, in order on Au grating grooves. It has been found that the diffraction efficiency of 0.03 or more was demonstrated in a wide energy range of approximately 200 eV to 900 eV.