Reduction of SiO<sub>2</sub> Layer on Si Substrate by Irradiation of Electron Beam:  AFM and AES Image Measurements

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.5 Surface Physics, Vacuum

Sun. Mar 10, 2019 4:00 PM - 6:00 PM PA5 (PA)

4:00 PM - 6:00 PM

〇Keisuke Fujimori¹, Yosuke Chida¹, Yusuke Masuda¹, Natsuki Ujiie¹, Yoshiharu enta¹ (1.Hirosaki Univ.)

Keywords:Silicon oxide, Reduction reaction, Electron-Irradiation effect