[10p-PA5-1~13] 6.5 Surface Physics, Vacuum

[10p-PA5-6] Metal vapor integration using low-T_g polymer materials

〇(M2)Riku Ou¹, Tsuyoshi Tsujioka¹ (1.Osaka Kyoiku Univ.)

Keywords:vacuum deposition, integration, metal

We have reported the metal-atom desorption from polydimethylsiloxane (PDMS) which has a low glass-transition temperature and its application to high-efficient vapor integration. The metal-vapor integration technique can be applied to coat a rera metal onto the 3D-target without significant evaporation loss. In this study, contamination during metal-vapor integration and film thickness fluctuation were investigated. As a result, PDMS contamination and thickness fluctuation were observed.