The 66th JSAP Spring Meeting, 2019

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7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication (Poster)

[10p-PA6-1~6] 7 Beam Technology and Nanofabrication (Poster)

Sun. Mar 10, 2019 4:00 PM - 6:00 PM PA6 (PA)

4:00 PM - 6:00 PM

[10p-PA6-4] Optimization of ALE conditions for metal films by gas cluster ion beams with acetylacetone

〇Noriaki Toyoda1, Kota Uematsu1 (1.Univ. of Hyogo)

Keywords:Gas cluster ion beam, Atomic layer etching, metal films