The 66th JSAP Spring Meeting, 2019

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Poster presentation

1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[10p-PB1-1~11] 1.6 Ultrasonics

Sun. Mar 10, 2019 1:30 PM - 3:30 PM PB1 (PB)

1:30 PM - 3:30 PM

[10p-PB1-4] Effect of fast- and slow-shear wave components on attenuation of LLSAW propagating on ScAlN film/quartz

〇Masashi Suzuki1, Shoji Kakio1 (1.Univ. of Yamanashi)

Keywords:Surface acoustic wave, ScAlN