[10p-PB1-1~11] 1.6 Ultrasonics

[10p-PB1-5] Analysis of longitudinal leaky SAW on LiNbO₃/amorphous layer/quartz structure

〇(B)Shiori Asakawa¹, Junki Hayashi¹, Masashi Suzuki¹, Syoji Kakio¹, Ami Tezuka², Hiroyuki Kuwae², Hiroaki Yokota³, Toshifumi Yonai³, Kazuhito Kishida³, Jun Mizuno² (1.Univ. of Yamanashi, 2.Waseda Univ., 3.Japan Steel Works)

Keywords:longitudinal leaky saw, amorphous, surface acoustic wave

In recent years, higher performance of the SAW device is demanded, and a structure combining different kinds of materials using a longitudinal leaky surface acoustic wave (LLSAW) which is advantageous for high frequency proposed. In this report, we report the results of theoretically investigating the characteristics of LLSAW in LN/amorphous layer/crystal structure. Al₂O₃ was elected in consideration of the fact that the fluctuation of the plate thickness showing the minimum value of the propagation attenuation is small in the intermediate layer.The Q value on the X36°Y-LN/Al₂O₃/X35°Y-Q structure was about 82,000 when h/λ = 0.07. In the future, we will conduct experiments and demonstrate the analytical results.