[10p-PB5-1~55] 17 Nanocarbon Technology (Poster)

[10p-PB5-51] Fabrication of transparent nano-mechanical resonator for high precision light pressure measurement

〇(B)yusuke Morimoto¹, Kuniharu Takei¹, Takayuki Arie¹, Seizi Akita¹ (1.Osaka Pref Univ.)

Keywords:mechanical resonator, BN, light pressure

It is considered that high-precision light pressure measurement ignoring the photoinduced thermal effect is possible by h-BN (boron nitride) mechanical resonator which is a substance not absorbing light in the visible light region. A thinner h-BN mechanical resonator is indispensable for higher sensitivity. In this study, we have studied the fabrication of a drum type h-BN mechanical resonator that can realize one to several atomic layer mechanical resonators