The 66th JSAP Spring Meeting, 2019

Presentation information

Oral presentation

12 Organic Molecules and Bioelectronics » 12.7 Biomedical Engineering and Biochips

[10p-S421-1~9] 12.7 Biomedical Engineering and Biochips

Sun. Mar 10, 2019 3:45 PM - 6:15 PM S421 (S421)

Takashi Tokuda(NAIST), Mana Toma(Kwansei Gakuin Univ.)

4:30 PM - 4:45 PM

[10p-S421-4] FABRICATION OF CAVITY-SEALED OPTICAL INTERFEROMETRIC SURFACE STRESS BIOSENSOR BY THIN FILM TRANSFER TECHNIQUE

Toshiaki Takahashi1, Yong-Joon Choi1, Satoshi Maruyama1, Miki Taki1, Kazuaki Sawada1, Kazuhiro Takahashi1,2 (1.Toyohashi Tech., 2.JST-PRESTO)

Keywords:surface stress sensor, Fabry-Perot interferometer, biosensor

We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by transfer technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing.
We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7 fold compared with the conventional sensor.