The 66th JSAP Spring Meeting, 2019

Presentation information

Symposium (Oral)

Symposium » Nanoscale 2D/3D analyses for new device and materials development II

[10p-W933-1~9] Nanoscale 2D/3D analyses for new device and materials development II

Sun. Mar 10, 2019 1:30 PM - 5:45 PM W933 (W933)

Yuji Matsumoto(Tohoku Univ.), Takashi Furukawa(Hitachi High-Technologies Corporation)

2:15 PM - 2:45 PM

[10p-W933-3] Nanoscale subsurface imaging based on atomic force microscopy

Hiroshi Tono1, Kuniko Kimura1, Kei Kobayashi1, 〇Hirofumi Yamada1 (1.Kyoto Univ.)

Keywords:AFM, subsurface