9:30 AM - 11:30 AM
[11a-PA5-12] Development of Deposition Model of DLC Film using Low-Pressure Capacitively-coupled Hydrocarbon Plasma
Keywords:Plasma enhunced chemical vapor deposition, Thin film deposition simulation, Capacitively-coupled Plasma
Poster presentation
8 Plasma Electronics » 8.2 Plasma deposition of thin film, plasma etching and surface treatment
Mon. Mar 11, 2019 9:30 AM - 11:30 AM PA5 (PA)
9:30 AM - 11:30 AM
Keywords:Plasma enhunced chemical vapor deposition, Thin film deposition simulation, Capacitively-coupled Plasma