[11a-PA5-1~12] 8.2 プラズマ成膜・エッチング・表面処理

▲ [11a-PA5-3] Morphological Characterization of RF Magnetron Sputtered Zinc Oxide Thin Films-Laser Assisted.

〇(M2)Edrick Abu Saidu¹、AKIO SANPEI¹、WATARU WAKAKI¹、YASUAKI HAYASHI¹ (1.KYOTO INST. OF TECH.)

キーワード：Zinc oxide, RF magnetron sputtering, Laser irradiation; morphological properties