[11a-PB3-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[11a-PB3-7] Development of AlGaN-based solar blind photodetector

〇Takahiro Okumura¹, Shinya Komuro¹, Ryuichi Toba², Tadao Tanabe¹, Takahiro Ohashi², Yutaka Oyama¹ (1.School of engineering, Tohoku Univ., 2.Graduate school of environmental studies, Tohoku Univ.)

Keywords:solar blind light