9:30 AM - 11:30 AM
[11a-PB4-13] Spectroscopic ellipsometry characterization of GaN surface exposed to NH3 plasma
Keywords:Nitride semiconductor, Spectrosopic ellipsometry, plasma
Poster presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Mon. Mar 11, 2019 9:30 AM - 11:30 AM PB4 (PB)
9:30 AM - 11:30 AM
Keywords:Nitride semiconductor, Spectrosopic ellipsometry, plasma