[11a-PB4-1~18] 15.4 III-V-group nitride crystals

[11a-PB4-8] Investigation of the heating method for substrates to improve the quality of h-BN thin films grown by CVD

〇Tomoyasu Nakama¹, Takumi Kawarazaki¹, Kazuki Matsusita¹, Hiroko Kominami¹, Kazuhiko Hara^2,3 (1.GSIST, Shizuoka Univ., 2.GSST, Shizuoka Univ., 3.RIE, Shizuoka Univ.)

Keywords:hexagonal boron nitride, chemical vapor deposition, thin films