[11a-S421-1~12] 3.9 Terahertz technologies

[11a-S421-5] Fabrication of High-Power Resonant-Tunneling-Diode Terahertz Oscillators

〇Hiroki Tanaka¹, Kazunori Kobayashi¹, Ryunosuke Izumi¹, Safumi Suzuki¹, Masahiro Asada¹ (1.Tokyo Tech)

Keywords:Terahertz, Resonant tunneling diode (RTD)

Terahertz (THz) radiation, between light waves and millimeter waves, has been receiving much attention because of its applications. Resonant tunneling diodes (RTDs) are major candidates for THz wave sources. However, the output power of RTD oscillators is small, in the order of 10 μW around 1 THz. We fabricated novel THz oscillators using RTDs with cavity resonators and bow-tie antennas for high output powers. Rectangular cavity resonators were fabricated by electron beam lithography technology using a tri-layer resist process (ZEP/PMGI/PMMA). The oscillator is composed of a line-shaped RTD mesa and a rectangular cavity resonator. Since the conduction loss and inductance of the rectangular cavity resonator is small, high output power oscillation with a large RTD mesa area is possible.