9:35 AM - 10:05 AM
[11a-W242-3] Piezoelectric thin-film vibration energy harvesting
Keywords:piezoelectric thin film, vibration energy harvesting
Piezoelectric thin-film energy harvesting tehnologies are expected to be the promising power sources for sensor nodes in IoT. In this talk, I will introduce the characteristic feature of piezoelectric MEMS and piezoelectric thin-film vibration energy harvesters based on our research activities.