[11a-W331-1~9] 3.15 Silicon photonics

[11a-W331-1] Fabrication of a silicon polarization grating using subwavelength structure

〇Shigeaki Sakai¹, Hiroyuki Tsuda¹ (1.Keio Univ.)

Keywords:polarization grating

Polarization grating has attracted attention as high efficiency and compact direction control is possible. In theory, it diffracts to only zero order light and ± first order light. Many prior studies using liquid crystals have been published for polarizing gratings, but by using silicon, it can be made more compact. In this research, we fabricated silicon polarization gratings using subwavelength structure which originates form birefringence.