9:00 AM - 9:15 AM
[11a-W351-1] Preparation of orientation controlled HfO2-based ferroelectric thick film by puttering method and their electrical properties
Keywords:ferroelectric film, HfO2
Oral presentation
6 Thin Films and Surfaces » 6.1 Ferroelectric thin films
Mon. Mar 11, 2019 9:00 AM - 12:00 PM W351 (W351)
Hironori Fujisawa(Univ. of Hyogo), Tomoaki Yamada(Nagoya Univ.)
9:00 AM - 9:15 AM
Keywords:ferroelectric film, HfO2