[11a-W934-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

△ [11a-W934-2] A Study on Parallel-Plate Electrodes for 3-Axis Au Proof-Mass MEMS Accelerometer

〇Takashi Ichikawa¹, Hirofumi Niijima¹, Tatsuya Koga¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Masato Sone¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

Keywords:MEMS Accelerometer