2:45 PM - 3:00 PM
[11p-70A-8] Growth-rate enhancement for 4H-SiC CVD trench filling
Keywords:trench filling, CVD, super-junction
4H-SiCトレンチのCVD埋め戻し成長における成長条件の検討と成長速度の高速化
Oral presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)
Mon. Mar 11, 2019 1:00 PM - 5:30 PM 70A (70th Anniversary Auditorium)
Koichi Murata(CRIEPI), Tomoaki Furusho(Mitsubishi Electric)
2:45 PM - 3:00 PM
Keywords:trench filling, CVD, super-junction