[11p-M113-1~20] 6.2 Carbon-based thin films

△ [11p-M113-13] Formation of Nitrogen-Terminated (111) Diamond with High Nitrogen Coverage

〇(B)Tetsuya Tatsuishi¹, Takahiro Sonoda¹, Sora Kawai¹, Hayate Yamano¹, Jorge J. Buendia¹, Taisuke Kageura¹, Yu Ishii¹, Kiro Nagaoka¹, Ryosuke Fukuda¹, Takashi Tanii¹, Moriyoshi Haruyama^2,3, Keisuke Yamada², Shinobu Onoda², Wataru Kada³, Osamu Hanaizumi³, Alastair Stacey⁴, Kazuhiro Kanda⁵, Masaharu Uemura^5,6, Tokuyuki Teraji⁷, Junichi Isoya⁸, Shozo Kono⁹, Hiroshi Kawarada^1,9 (1.Waseda Univ., 2.QST, 3.Gunma Univ., 4.Univ. of Melbourne, 5.Univ. of Hyogo, 6.SALLC, 7.NIMS, 8.Univ. of Tsukuba, 9.ZAIKEN)

Keywords:Nitrogen-Termination, (111) Diamond, NV Center

Nitrogen terminated (100) diamond with a high nitrogen coverage has been prepared so far that the charge state of shallow NV - in diamond is stable. Nitrogen terminated (111) diamond is presumed to stabilize the charge state of shallow NV -, since the electron affinity on the surface is as positive (+ 3.23 eV) as that of nitrogen terminated (100) diamond. We succeeded in fabricating nitrogen terminated (111) diamond with high nitrogen coverage by using pure nitrogen gas as a radical source for nitrogen beam exposure.