[11p-M116-1~15] 1.5 Instrumentation, measurement and Metrology

[11p-M116-15] Study of an inspection system for defects in walls using terahertz 3D imaging

〇Homare Momiyama^1,2,3, Yoshiaki Sasaki², Isao Yoshimine², Shigenori Nagano¹, Tetsuya Yuasa³, Chiko Otani² (1.TOPCON, 2.RIKEN RAP, 3.Yamagata Univ.)

Keywords:3D imaging, nondestructive inspection

We constructed two types of three-dimensional imaging systems using a terahertz wave source for the inspection of defects in infrastructures and evaluated its performance: a swept source optical coherence tomography (SS-OCT) system, and a phase-shifting interferometry (PSI) system. Experiments showed the depth resolutions of SS-OCT and PSI were 68 mm and 3 µm, respectively. In addition, we imaged voids behind a tile using the SS-OCT system to demonstrate the effectiveness of the inspection application.