The 66th JSAP Spring Meeting, 2019

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.5 Instrumentation, measurement and Metrology

[11p-M116-1~15] 1.5 Instrumentation, measurement and Metrology

Mon. Mar 11, 2019 1:15 PM - 5:00 PM M116 (H116)

Nao Terasaki(AIST), Abe Hisashi (AIST), Minami Amano(AIST)

2:45 PM - 3:00 PM

[11p-M116-7] Adhesion Force Measurements at Surfaces of a PVA Cleaning Brush for Semiconductor Wafer by AFM in Liquids

〇Takahiko Ikarashi1, Takumi Yoshino1, Kazuki Miyata1,2, Keisuke Miyazawa2, Megumi Uno3, Chikako Takatoh3, Takeshi Fukuma1,2 (1.Kanazawa Univ., 2.WPI-NanoLSI,Kanazawa Univ., 3.EBARA Corp.)

Keywords:Atomic force microscopy, Polyvinyl alcohol, Adhesion force