Takahiko Ikarashi

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Speaker, Author, Co-Author

Mon. Mar 11, 2019 1:15 PM - 5:00 PM M116 (H116)

Oral presentation
| 1 Interdisciplinary Physics and Related Areas of Science and Technology
| 1.5 Instrumentation, measurement and Metrology

[11p-M116-1~15] 1.5 Instrumentation, measurement and Metrology

2:45 PM - 3:00 PM

[11p-M116-7] Adhesion Force Measurements at Surfaces of a PVA Cleaning Brush for Semiconductor Wafer by AFM in Liquids

〇Takahiko Ikarashi¹, Takumi Yoshino¹, Kazuki Miyata^1,2, Keisuke Miyazawa², Megumi Uno³, Chikako Takatoh³, Takeshi Fukuma^1,2 (1.Kanazawa Univ., 2.WPI-NanoLSI,Kanazawa Univ., 3.EBARA Corp.)

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