[11p-PA3-1~10] 1.4 Energy conversion, storage, resources and environment

[11p-PA3-5] Evaluation of Si-NW µ-TEG with metal/insulator multilayered conductive films

〇Shuhei Hirao¹, Ryo Yamato¹, Tianzhuo Zhan¹, Mao Xu¹, Hiroki Takezawa¹, Kohei Mesaki¹, Motohiro Tomita¹, Yibin Xu², Takanobu Watanabe¹ (1.Waseda Univ., 2.NIMS)

Keywords:semiconductor