[11p-PA6-1~7] 15.7 Crystal characterization, impurities and crystal defects

△ [11p-PA6-1] First principles analysis on stability and diffusion barrier of metal atoms near the Si (001) surface

〇(M1)Noriyuki Nonoda¹, Koji Sueoka² (1.Graduate School of Okayama Pref. Univ., 2.Okayama Pref. Univ.)

Keywords:Si wafer, metal, First principles analysis