[11p-W242-1~6] Recent Progress of Energy Harvesting

[11p-W242-4] Fabrication and evaluation of planar-type Si thermoelectric harvesters by nanoimprint lithography

〇Ryoto Yanagisawa¹, Patrick Ruther², Oliver Paul², Masahiro Nomura^1,3 (1.IIS Univ. of Tokyo, 2.IMTEK Univ. of Freiburg, 3.PRESTO JST)

Keywords:thermoelectrics, silicon, phonon engineering

We developed a planar-type Si thermoelectric harvester with nanostructure patterning. In order to achieve high output power, we used nanoimprint lithography techniques to pattern nanostructure in the large area of Si wafer.