4:00 PM - 4:15 PM
[11p-W321-9] Ohmic InP/Si Heterointerfaces by Direct Semiconductor Wafer Bonding
Keywords:semiconductor wafer bonding, multijunction solar cell, ohmic heterostructure
Direct-bonded ohmic InP / Si heterostructures are realized for the fabrication of lattice-mismatched multijunction solar cells and replacement of compound semiconductor substrates with silicon substrates. We have examined the dependence of electrical conductivity on bonding temperature and doping type.